METHOD FOR PRODUCING POLYCRYSTALLINE SILICON ROD,

专利名称：METHOD FOR PRODUCING

POLYCRYSTALLINE SILICON ROD,POLYCRYSTALLINE SILICON ROD, ANDPOLYCRYSTALLINE SILICON MASS

发明人：Shuichi MIYAO,Junichi OKADA,Shigeyoshi

NETSU

申请号：US15309218申请日：20150527

公开号：US20170073235A1公开日：20170316

专利附图：

摘要：A polycrystalline silicon rod is synthesized by the Siemens method (S). After thepolycrystalline silicon rod is covered from above with a plastic bag whose inner surfacehas been washed, and housed in the plastic bag in a reactor (S), the polycrystalline siliconrod is removed out of the reactor (S), and heat-sealed and stored in an enclosed state (S).According to the present invention, steps conventionally considered as essential, such aswashing, etching, and water washing, are not always necessary, and therefore theconcentrations of fluorine ions, nitrate ions, and nitrogen dioxide ions remaining on thesurface can each be less than ppbw. In addition, by covering with the plastic bag, themetal contamination levels decrease significantly. Moreover, when the handling accordingto the present invention is performed, surface contamination hardly proceeds even if thepolycrystalline silicon rod is stored for a long period.

申请人：SHIN-ETSU CHEMICAL CO., LTD.

地址：Tokyo JP

国籍：JP

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