PROCESSING APPARATUS AND OPERATING METHOD THEREFOR

专利名称：PROCESSING APPARATUS AND OPERATING

METHOD THEREFOR

发明人：Kouji TAKUMA申请号：US12683112申请日：20100106

公开号：US20100174397A1公开日：20100708

专利附图：

摘要：Disclosed is a processing apparatus to restrain load of a common usage systemshared by a plurality of liquid processing modules. A processing module group includes ksets of share groups comprising a plurality of processing modules to perform an

identical processing for each substrate (where, k≧2), each set of share groups includes nprocessing modules (where, n≧2), and each processing module includes the commonusage system shared by n processing modules in each set and having a maximum capacitycapable of processing m processing modules (where m≦n). A carrying mechanismrepeatedly loads a substrate one by one to the processing module of each set insequence. At this time, (1) after the completion of the processing in one processingmodule that uses the common usage system, the substrate is loaded into anotherprocessing module in the same set, or (2) without waiting for the completion of theprocessing in one processing module, the substrate is loaded into another processingmodule and then the processing is started in another processing module after thecompletion of the processing in one processing module.

申请人：Kouji TAKUMA

地址：Koshi City JP

国籍：JP

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