专利名称：Microcrystalline silicon structure and
fabrication process
发明人：Chia-Hong Jan,Sean F. Corcoran申请号：US08/916016申请日：19970821公开号：US06114722A公开日：20000905
摘要：A film primarily comprising silicon crystal grains having a random crystalstructure. The average size of the grains is within the range of approximately 50 Å to 500Å.
申请人：INTEL CORPORATION
代理人：David J. Kaplan
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